复旦大学智慧纳米机器人与纳米系统国际研究院在义乌基地位于复旦大学义乌研究院，已建成各类实验室面积3600余平米、配套科研设备2200余万元，采购流程中各类仪器设备近3000万元。在建实验室面积2500平，配套科研设备2000余万元。目前登记的投入科学仪器设备原值达2259万元。义乌基地实验室主要位于义乌市中福广场五号楼及雪峰西路968号义乌科技创业园13号楼一层。其中科创园实验室占地约600平方米。规划洁净空间超400平方米，其中千级洁净空间约50平方米。

实验室用于微纳加工工艺的开发和微纳电子器件的表征的大型仪器设备26台，包括等离子体物理沉积、PECVD、管式扩散炉、模板图形转化仪、紫外光刻机、电子束蒸发镀膜设备、磁控溅射镀膜设备、XeF2刻蚀系统、超临界干燥仪、Parylene纳米镀膜设备、倒置荧光显微镜、半导体参数分析系统、扫描电子显微镜镜、台阶仪、光学显微镜、引线键合机、快速退火炉、等离子清洗机、射频矢量信号发生器、数字示波器、网络分析仪、核磁共振质谱仪、三维扫描仪、多模式光声成像系统、超声声场分布检测系统等。涉及氧化扩散、光刻、薄膜沉积、刻蚀、封装等泛半导体产业所需的多道工艺。目前有2名青年研究员参与管理，4名专职工程师负责实验室的日常运转和维护。义乌基地实验室对智慧纳米机器人与纳米系统国际研究院开放设备共享及加工服务，以满足智慧纳米机器人与纳米系统国际研究院科研需求。

The Yiwu base of IIINN, the Fudan University Yiwu Institute, has established laboratories covering an area of over 3,600 square meters, equipped with scientific research facilities worth more than 22 million RMB, and equipment in purchasing process value at nearly RMB 30 million. There are laboratories under construction covering an area of 2,500 square meters, with supporting scientific research equipment worth more than RMB 20 million RMB. The current registered original value of scientific instruments and equipment invested amounts to RMB 22.59 million. The laboratories at the Yiwu base are primarily situated in Building 5 of Zhongfu Plaza and on the first floor of Building 13, Yiwu Science and Technology Entrepreneurship Park, No. 968 Xuefeng West Road. Among them, the laboratory in the Science and Technology Entrepreneurship Park occupies approximately 600 square meters. The planned cleanroom space exceeds 400 square meters, with approximately 50 square meters designated as ISO Class 1000 clean space.

The laboratory is equipped with 26 large-scale instruments and equipment for the development of micro-nano processing technologies and the characterization of micro-nano electronic devices, including Plasma Physical Deposition, PECVD, Tubular Diffusion Furnace, Template Pattern Transfer Machine, UV Lithography Machine, Electron Beam Evaporation Coating Equipment, Magnetron Sputtering Coating Equipment, XeF2 Etching System, Supercritical Drying Apparatus, Parylene Nano Coating Equipment, Inverted Fluorescence Microscope, Semiconductor Parameter Analysis System, Scanning Electron Microscope, Step Profiler, Optical Microscope, Wire Bonder, Rapid Annealing Furnace, Plasma Cleaner, RF Vector Signal Generator, Digital Oscilloscope, Network Analyzer, Nuclear Magnetic Resonance Mass Spectrometer, 3D Scanner, Multi-Mode Photoacoustic Imaging System, and Ultrasonic Sound Field Distribution Detection System. These cover multiple processes required by the broader semiconductor industry, including oxidation diffusion, lithography, thin-film deposition, etching, and packaging. Currently, there are two young researchers involved in management and four dedicated engineers responsible for the daily operation and maintenance of the laboratory. The Yiwu base laboratory provides equipment sharing and processing services to IIINN to meet its research needs.